Pulsed & CW RF Power Sensors

Pulsed & CW RF Power Sensors

7020 & 7030 Series, Pulsed & CW RF Power Sensors

Bird’s Pulsed RF Power Sensors are engineered for precision in semiconductor applications, delivering reliable, NIST-traceable accuracy for both development and production engineers in lab and fab environments. The 7020 Series offers 1% accuracy, while the 7030 Series achieves 0.5% accuracy at calibrated frequencies, supporting precise measurements of continuous wave (CW) and pulsed signals.

Designed to meet the demands of increasingly complex RF waveforms, these sensors provide the flexibility and confidence needed to manage dynamic signals. With advanced capabilities such as time-domain analysis and pulse insight, the CW + Pulsed sensor family equips engineers to adapt to evolving processes while safeguarding long-term investments.


Accuracy & Signal Type

Models 7027 | 7029 (±1.0% across entire power range)

Models 7037 | 7039 (0.5% across entire power range)

CW and Multi-State Pulsed RF Power Sensors

Key Features

NIST-traceable

Multi-level pulsed waveforms

Average and gated power measurements

Time-domain

Pulse resolution down to 1 µs

SCPI automation

Applications

Semiconductor fabs, tool calibration and process control

High-precision etch and deposition applications, metrology labs.


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